JPH0465978B2 - - Google Patents

Info

Publication number
JPH0465978B2
JPH0465978B2 JP58207142A JP20714283A JPH0465978B2 JP H0465978 B2 JPH0465978 B2 JP H0465978B2 JP 58207142 A JP58207142 A JP 58207142A JP 20714283 A JP20714283 A JP 20714283A JP H0465978 B2 JPH0465978 B2 JP H0465978B2
Authority
JP
Japan
Prior art keywords
sample
sample stage
water
liquid
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58207142A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6098358A (ja
Inventor
Fumio Uchino
Hitoshi Tateoka
Mitsugi Sakai
Ikuzo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP58207142A priority Critical patent/JPS6098358A/ja
Publication of JPS6098358A publication Critical patent/JPS6098358A/ja
Publication of JPH0465978B2 publication Critical patent/JPH0465978B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/28—Details, e.g. general constructional or apparatus details providing acoustic coupling, e.g. water
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2697—Wafer or (micro)electronic parts

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
JP58207142A 1983-11-02 1983-11-02 超音波顕微鏡用試料台装置 Granted JPS6098358A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58207142A JPS6098358A (ja) 1983-11-02 1983-11-02 超音波顕微鏡用試料台装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58207142A JPS6098358A (ja) 1983-11-02 1983-11-02 超音波顕微鏡用試料台装置

Publications (2)

Publication Number Publication Date
JPS6098358A JPS6098358A (ja) 1985-06-01
JPH0465978B2 true JPH0465978B2 (en]) 1992-10-21

Family

ID=16534896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58207142A Granted JPS6098358A (ja) 1983-11-02 1983-11-02 超音波顕微鏡用試料台装置

Country Status (1)

Country Link
JP (1) JPS6098358A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013170902A (ja) * 2012-02-20 2013-09-02 Hitachi Power Solutions Co Ltd ワーク吸着固定装置および超音波検査システム

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63111455A (ja) * 1986-10-30 1988-05-16 Olympus Optical Co Ltd 超音波顕微鏡
US8739631B2 (en) * 2012-02-28 2014-06-03 Sperry Rail, Inc. System and method for non-destructive testing of railroad rails using ultrasonic apparatuses mounted within fluid-filled tires maintained at constant temperatures

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5113774U (en]) * 1974-07-19 1976-01-31
JPS57182645A (en) * 1981-05-07 1982-11-10 Olympus Optical Co Ltd Ultrasonic microscope
JPS5815151A (ja) * 1981-07-22 1983-01-28 Hitachi Ltd 超音波顕微鏡

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013170902A (ja) * 2012-02-20 2013-09-02 Hitachi Power Solutions Co Ltd ワーク吸着固定装置および超音波検査システム

Also Published As

Publication number Publication date
JPS6098358A (ja) 1985-06-01

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